SIERRA Thermal Mass Flow meters
General Description
SIERRA Instruments offers a wide variety of thermal mass flow meters, fitting any gas measuring application.
The low-Flow line covers flow rates from 0.05 - 1000 nl/min and offers products for high-Accuracy Applications as well as economical solutions for industrial meterruns.
Many of SIERRA's mass flow meters can be equipped with a COMPOD module, which extends it's In- & Output connections by open-source RS485-MODBUS RTU, as well as digital and analogue signals. The COMPOD module allows complete integration in an existing network and remote control & diagnostics.
Additionally a control valve can be added to most SIERRA flowmeters, making it an accurate flowcontroller, easily adjustable by using the already integrated Dial-a-Gas technology as well as the optional COMPOD module.
All Mass-Flowmeters using SIERRA's Capillary Thermal Technology have to be used with dry and clean gas. Read more about the thermal mass flow metering principles in our technologies section.
Smart-Trak® Model 100 - High Accuracy Mass flow meter
Digital high performance, stainless steel with Dial-A-Gas® Technology & computer control. Flow ranges from 0 to 15 sccm to 0 to 1000 slpm.
- Flow ranges: from 0 to 10 sccm to 0-1000 slpm.
- Max. Pressure: 34 bar
- Temp.: 0-50 °C
- Accuracy: +/- 0.5% of full scale
- Repeatability: +/- 0.2% of full scale
- Materials: 316 stainless steel construction
- Connections: VCO, VCR, Compression fitting
- Capillary Thermal Technology
- True digital performance with great flexibility
- “Primary Standard” calibration NIST traceability
- Dial-A-Gas® Technology
- 10 pre-programmed gases come standard
- Substitute up to 9 gases of your own
- Unique Pilot Module allows you to view and change critical control functions
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- control functions also available from PC via RS-232
- Traditional analog control also included
- 4-20 mA
- 0-5 Vdc
- 0-10 Vdc
- 1-5 Vdc
- Source code for RS-232 communication provided
- Multi-drop RS-485/MODBUS RTU (Using Compod)
- Profibus DP
- Small footprint makes drop-in replacement easy
- Single-sided 24 Vdc power supply
- CE approval
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For more detailed information visit
SIERRA's Product Description
Micro-Trak™ Model 101 Ultra Low Flow Mass
Specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Also get digital high performance, stainless steel construction with Dial-A-Gas® Technology & computer control.
- Flow ranges: 0.1 - 4 sccm (smlm)
- Max. Pressure: 34 bar
- Temp.: 0-50 °C
- Accuracy: of +/- 1.0% of full scale
- Repeatability: of +/- 0.2% of full scale
- Materials: 316 Stainless steel construction
- Connections: VCO, VCR, Compression fitting
- Capillary Thermal Technology
- Digital performance with maximum flexibility
- Primary Standard calibration and NIST traceability
- Dial-A-Gas Technology—10 preprogrammed gases or select your own
- Unique Pilot Module allows you to view and change critical control functions
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- All functions also available via RS-232
- Multi-drop RS-485/MODBUS RTU (Using Compod)
- Profibus DP
- Traditional analog controls and outputs also included:
- 4-20 mA
- 0-5 VDC
- 1-5 VDC
- 0-10 VDC
- Small footprint makes installation easy
- 24 VDC power supply
- CE approval
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For more detailed information visit
SIERRA's Product Description
Max-Trak® Model 180 Industrial Mass Flow Meters
Industry’s only NEMA 6/IP67 truly industrial MFC; Available as heavy industrial flanged version; Accuracy of +/- 1% of Full Scale and flow ranges from 0 to 10 SLPM to 0 to 1000 SLPM
- Industry's only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures
- Flow-ranges: 0-1000 SLPM
- Max. Pressure: 34 bar
- Temp.: 0-50 °C
- Accuracy: +/- 1% of Full Scale
- Repeatability: +/- 0.2% Full Scale ensures a stable process even under changing conditions
- Connections: VCO, VCR, Compression fitting, Flange
- Capillary Thermal Technology
- Dial-A-Gas® lets you select from up to 10 gases in one instrument, creating great flexibility and reducing spares inventories
- Operation at low differential pressures possible due to powerful valve design
- Both digital and analog communication included
- Multi-drop RS-485/MODBUS RTU
- All stainless steel construction is suitable for any clean gas, even corrosives & toxics
- Single sided power (24 VDC) reduces installation cost
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- View and change critical control functions in the field via RS-232 or our unique Pilot Module
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For more detailed information visit
SIERRA's Product Description
Max-Trak® Model 180 Industrial Mass Flow Meter
Industry’s only NEMA 6/IP67 truly industrial MFC; Also available as heavy industrial flanged version; Accuracy of +/- 1% of Full Scale and flow ranges from 0 to 10 SLPM to 0 to 1000 SLPM
- Flow-ranges: 0-1000 SLPM
- Max. Pressure: 34 bar
- Temp.: 0-50 °C
- Accuracy: +/- 1% of Full Scale
- Repeatability: +/- 0.2% Full Scale ensures a stable process even under changing conditions
- Connections: VCO, VCR, Compression fitting, Flange
- Industry's only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures
- Capillary Thermal Technology
- Dial-A-Gas® lets you select from up to 10 gases in one instrument, creating great flexibility and reducing spares inventories
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- Both digital and analog communication included
- Multi-drop RS-485/MODBUS RTU
- All stainless steel construction is suitable for any clean gas, even corrosives & toxics
- Single sided power (24 VDC) reduces installation cost
- View and change critical control functions in the field via RS-232 or our unique Pilot Module
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For more detailed information visit
SIERRA's Product Description
Digital Smart-Trak 50 Series Mass Flow Meters
Rapid off-the-shelf delivery lead-times; Constructed from your choice of 316SS or aluminum; Accuracy of +/- 1.5% of full scale and flow ranges from 0-10 sccm to 0-200 slpm, RS-232, RS-485, small footprint, CE approved.
- Flow Range: 0-10 sccm up to 50 slpm (nlpm) range, compact footprint
- Max. Pressure: 10 bar
- Temp.: 0-50°C
- Accuracy: +/- 1.5% of Full Scale
- Repeatability: +/- 0.25% of Full Scale
- Connections: VCO, VCR, Compression fitting
- Materials: Aluminium
- Response Time: Fast 300ms valve time constant
- Field Calibration: Field zero, span, adjust
- Interface/Communications: Large local display or free user software; 4-20mA, 0-5 Vdc, RS-232, RS-485 (addressable)
- Gas: All clean gases
- Approvals: CE
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- Capillary Thermal Technology
- Off the shelf delivery on seven common in-stock flow rates
- Easy setup, field calibrate without sending units back to factory
- Add communications, displays or future functionality as needed
- Competitive pricing and volume discounting
- Free engineering for basic customization
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For more detailed information visit
SIERRA's Product Description